

Key Features
Low internal volume (0.9cm³)
Ultra-stable CVD sensing technology
Class 100 / ISO Class 5 cleanroom packed and double bagged
High EMI/RFI immunity rating
Markets & Applications
Machine Automation
Exhaust gas for CVD and etching equipment
Process gas analyzers
Gas Sticks
High-Purity Gas Delivery Systems
Electrical Termination
M12 Hirschmann® 993-172-100
Surface Finish
0.5 μm Ra or optional 0.18 μm Ra
Stability
≤±0.25% span/year at reference conditions
Output Signal
4-20 mA (2-wire)
Process Connection Size
9⁄16-18 UNF (compatible with 1⁄4 VCR®) swivel male or female
Pressure Type
Gauge pressure
Accuracy
0.25% of span
Process Connection Style
Threaded flow through
Threaded
Case or Body Material
PBT (meets UL 94-V-0)
Stainless steel 304 (1.4301)
Ingress Protection
IP67
Wetted Parts Material
Stainless steel 316L (1.4404)
Ranges
3 ... 200 bar / 45 ... 3000 psi
Compound