Key Features
Ultra-stable CVD sensing technology
Low internal volume (0.9cm³)
Class 100 / ISO Class 5 cleanroom packed and double bagged
High EMI/RFI immunity rating
Markets & Applications
Machine Automation
High-Purity Gas Delivery Systems
Gas Sticks
Process gas analyzers
Exhaust gas for CVD and etching equipment
Pressure Type
Gauge pressure
Absolute pressure
Process Connection Size
9⁄16-18 UNF (compatible with 1⁄4 VCR®) swivel male or female
Ranges
3 ... 200 bar / 45 ... 3000 psi
Compound
Electrical Termination
M12 Hirschmann® 993-172-100
Wetted Parts Material
Stainless steel 316L (1.4404)
Output Signal
4-20 mA (2-wire)
Ingress Protection
IP67
Case or Body Material
Stainless steel 304 (1.4301)
PBT (meets UL 94-V-0)
Stability
≤±0.25% span/year at reference conditions
Process Connection Style
Threaded flow through
Threaded
Accuracy
0.25% of span
Surface Finish
0.5 μm Ra or optional 0.18 μm Ra
Select your Region!